Advanced Research Center for Nanolithography officially opened

21 November 2014

On Tuesday, 11 November 2014, the Advanced Research Center for Nanolithography (ARCNL) in Amsterdam was officially opened by Sander Dekker, Dutch State Secretary for Education, Culture and Science, and Martin van den Brink, ASML President and Chief Technology Officer. HIMS professor Fred Brouwer heads the ARCNL research group Nanophotochemistry.

ARCNL focuses on the fundamental physics involved in current and future key technologies in nanolithography, primarily for the semiconductor industry. A significant part of the initial program is devoted to the physics that is central in the generation of high intensities of extreme ultraviolet light and its use in nanolithography. 

ARCNL is a public-private partnership between 

  • the Foundation for Fundamental Research on Matter (FOM);
  • the University of Amsterdam (UvA);
  • the VU University Amsterdam (VU); and
  • ASML, manufacturer of lithography equipment for the chip industry. 

On 1 January 2014 ARCNL kicked-off with professor Joost Frenken as its director. 

Nanophotochemistry

Fred Brouwer, professor Spectroscopy and photonic materials

Fred Brouwer

To date five research groups have started and the first researchers have been hired.

Among them is professor Fred Brouwer, who heads the Nanophotochemistry research group.

Brouwer is professor in Spectroscopy and Photonic Materials at the Van 't Hoff Institute for Molecular Sciences (HIMS).

The goals of the research group Nanophotochemistry are to investigate the fundamental mechanisms of chemical pattern formation in thin films by short wavelength UV radiation. The knowledge gained will be used to develop materials with improved properties and to explore new strategies for nanoscale pattern transfer. For the actual chemical synthesis of active components in the so called photo resist material, the group will use the laboratories of HIMS. 

Independent research center

Advanced Research Center for Nanolithography

An ‘Advanced Research Center’ is a new type of collaboration, used by NWO as an impetus for collaboration between universities and private parties. The private and public parties contribute each 50% of the base funding; the City of Amsterdam and the Province of Noord-Holland provide additional financial support.

During a short, initial phase, ARCNL formally operates as a department of the FOM Institute AMOLF. After this phase it will operate as an independent research center, staffed by approximately one hundred scientists and technical support staff. ARCNL is managed by FOM under the auspices of the Netherlands Organisation for Scientific Research (NWO) and is located at the Amsterdam Science Park.

Published by  HIMS